Beamsense FLEX-M863

The FLEX-M863 is a compact, high-resolution micro-focus X-ray inspection system designed for non-destructive visualization of internal structures in electronic components, semiconductors, and printed circuit boards. It combines ease of use with exceptional image quality — making the invisible visible.

 

Key features:

  • High-resolution imaging: 1.5 million pixel CCD sensor with 20μm pixel size delivers HDTV-class images. Achieves 2μm resolution at 10x magnification.
  • Compact and eco-friendly: Ultra-low power consumption of only 150W. Lead-free design (except shielding glass). Small footprint: approximately 800W x 645D x 523H mm.
  • Simple operation: PC-based control with joypad and mouse. Intuitive interface suitable for any user.
  • Open design for easy sample handling: Large X-ray shielding glass windows on top and front door. Built-in cross laser line marker for precise sample positioning.
  • Tilting table function: ±17 degree tilt enables observation of overlapping and hidden structures. Electric zoom and tilting functions built-in.
  • Flexible magnification: Geometric magnification from 1.18x to 10x (continuous electric movement). Digital magnification from 10% to 400%.
  • Image processing: Brightness, contrast, gamma correction, binarization, false color display. Unsharp mask and sharp mask filters. Length measurement, area measurement, and area ratio calculation.
  • Still and animation capture: Still image exposure from 0.1s to 10s (up to 100 accumulations). Animation shooting from 5s to 180s at 5 frames per second.

 

Optional accessories:

  • One-axis rotation table unit (FLEX-U1RT): Enables 360-degree sample rotation. With optional CT software, enables 3D-CT imaging for samples 1mm to 10mm in diameter.
  • PCB fixing table unit (FLEX-U2PS): Securely holds printed circuit boards from 50mm x 50mm to 320mm x 240mm. Prevents board shifting during tilt operations.
  • 45°/60° PCB tilt stand unit (FLEX-U3DS): Designed for observing BGA soldering conditions. Positions board at 45° rotation and 60° tiltA

Product Specifications

FLEX-M863
X-ray generator

Tube voltage: 0 to 70kV

Tube current: 0 to 140/μA

Focal spot size: about 7μn

Sealed tube system

CCD censor Pixel size: 20x 20ym Pixels: 1 500 x 1000
Table Table size: 350 x 270mm Electrical control by PC. Stroke: X-axis: 325mm, Y-axis: 245mm, Z-axis: 200mm,
Object weight: Maximum 1.5kg
Object height limit: 7mm at 10-fold magnification and 34mm at 8-fold magnification.
(If it over the limit, the object may hit the top board and may be damaged.)
Main body Dimensions About W800 x D645 x H523mm Weight: About 115kg
Leakage dosage Under 0.5/μSv/h Measured by ionztion chamber type survey meter (ICS-321).
Power supply AC 100 ~ 240V Single phase 50Hz/60Hz 150VA
Hours 0.1 s to 10s / Adding times: Max. 100
Still image shooting Exposed time: 0.1 s to 10s Quantity survey: Maximum l00times Image size/resoluton (at 10-fold magnification): 1500 x 1000 pixels/2μm 750 x 500 pixels/4μm 375 x 250 pixels/8μm
Animation shooting Time: 5s to 180s Display: Imagesize 375 x 250 pixels Maximum 4 frames/s
Image saving Still image: bmp (8bit, 16bit), JPEG, tmp filed 6, 32bits) (Cannot to store and record animation shooting)
Image reading File format: bmp, JPEG, and tmp files
CCD correction Correction point: 2 points of bright and dark Corretion times: 1 to 99 times(recommend 10 times)
Image correction Brightness, Contrast, gamma, Reversible, Binarization, Color display(false color)
Image quality filter Unsharp mask, Sharp mask
Length measuring function Length measuring Scale register: Sets standard scale measurement for same magnification shooting.
Measurement pattern: Straight and broken lines, Distanse of the parallel lines etc.
Area Measurement Area, Area ratio, Area brightness average, etc.
Magnification Geometric magnification: 1.18 to 10-fold, continuous electrical movement. Digital magnification: 10 to 400%,
variable each 10% step(Magnification will be changed due to thickness of samples).
Images on a Screen 9 images (Max. 25 images)
Tilt table function Tilts maximum about puls and minus 17 degrees at the position of double geometric magnification.
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